Zeiss CrossBeam 550 XL

The techniques employed on this instrument are High-Resolution FE-SEM imaging, (cryo-)Correlative Light and Electron Microscopy and

Experiment information

The Zeiss Crossbeam 550XL is a high-resolution FE-SEM equipped with a Gemini II SEM column, a Capella Ga- liquid metal ion (Ga-LMIS) FIB and a Quorum cryo-stage and cryo-prep station with airlock. It is a highly versatile piece of kit which can be used for a range of applications in the life and material sciences, allowing high-resolution SEM imaging at room temperature and in cryogenic conditions. Dual-channel detection is also enabled, allowing surface and material contrast images to be acquired simultaneously.

The FIB beam can be used to mill nanostructures onto material samples, but also to perform slice-and-view destructive 3D imaging and to prepare lamellas for electron tomography experiments. Area refinding between different imaging modalities can be achieved using preinstalled Atlas software, enabling correlative imaging of specimens.

The instrument is not suitable for Cryogenic Lamella Milling, Lift-Out, EDX.

Technical specifications

The system features:

  • a 6-axis motorised stage
  • two Gas Injection Systems, capable of on-stage coating of samples with platinum or carbon
  • plasma-driven platinum cryo-coating device in the Quorum prep station
  • sublimation prep device in Quorum prep station
  • freeze-fracture capabilities in Quorum prep station
Sample temperature range  25 to -175°C​ 
​Stage tilt  ​-15 to 70° 
​Stage rotation  ​360 continuous (room temperature sample stage only) 
​Column angle  ​54° 
​SEM voltage ​0.02 to 30kV 
SEM probe intensity​  ​10pA to 40nA (high-resolution mode) or 10pA to 100nA (high-current mode) 
​SEM magnification  ​12- 2,000,000x 
​SEM resolution  ​1.6nm at 1kV 
​Detector collector bias  ​0 to  400V 
​ESB grid  ​0 to 1500V 
​Image format ​8 or 16 bit tiff, 4:3 format up to 32768 x 24576 pixels​​ (depending on detector) 
​FIB Voltage  ​30kV (0.5 to 5kV in low kV mode) 
​FIB probe intensity ​1pA to 100nA 
FIB magnification  ​300 to 500,000x 
​FIB resolution   ​3nm at 30kV 

 

​Detector  ​Application
​Chamber Everhart Thornley SE2  Surface contrast, long range, not compatible with slice-and-view imaging 
​InLens SE2  Surface contrast, short range, compatible with slice-and-view imaging, ideal as main detector for cryo-vEM mode. 
​InLens ESB  ​Some material contrast, compatible with slice-and-view imaging. Ideal as auxiliary detector for high-Z materials in a biological matrix in cryo-vEM mode, or for RT vEM. 
​Pneumatic retractable 4-quadrant solid-state BDS1  Provides material contrast, not compatible with slice-and view modality 

 

​Sample holder
 		 Compatible temperatures 
​9-stub carousel holder  ​Room temperature 
​CorrMic holder for room temperature correlation between Zeiss instruments – best used with tissue sections on slides or EM grids  ​Room temperature
 
​Flat cryo-holder for bare EM grids  ​Cryogenic – Quorum stage 
​Flat cryo-holder for autogrids  ​​Cryogenic – Quorum stage 
​Flat cryo-holder for bare sapphire disks  ​​Cryogenic – Quorum stage 
​Flat cryo-holder for superSIL assemblies  ​​Cryogenic – Quorum stage 
​Flat HPF Planchette cryo-holder  ​​Cryogenic – Quorum stage 
​Variety of cryo-SEM holders for fibres, foams, gels and solid samples​  ​​Cryogenic – Quorum stage